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| title | A Comparison of Measurement Techniques for Determining Phosphorus Densities in Semiconductor Silicon |
| authors | Thurber, Robert. W. |
| journal | Journal of Electronic Materials |
| year | 1980 |
| volume | 9 |
| issue | None |
| first page | 551 |
| last page | 560 |
| reference | None |
| pages number | None |
| code | filename | cod code | phase generic | phase name | chemical formula | publication |
|---|---|---|---|---|---|---|
| 1000352 | 1000352.mpod | 9008565 | P-doped silicon | silicon | Si1 | 180 |